172nm Excimer Lamp
Applications
- Breaking chemical bonds on surfaces, activation
- Improvement of adhesiveness
- Cleaning of organic residue/ dirt
- Water purification
- Improvement of pumping power of vacuum pumps
- Matting of acrylic lacquers without chemical agents
- Lacquer hardening
- Semiconductor industry
Advantages
- No heating up phase: Radiation for direct use!
- For huge surfaces and at high speed
- Monochromatic radiation of 172nm, no UV-A or UV-B
- Very efficient, conversion efficiency of about 40%
- No cooling required (nitrogen purging)
- No limitation on switching cycles
- Light weight
- Long service life
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